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Vertical/vertical double chamber rotary coating production line

This vertical coating production line is a magnetron sputtering continuous coating production line, the workpiece frame movement adopts magnetic guide structure, with workpiece frame automatic return system, reducing labor force. the workpiece is installed vertically, can reduce the pinhole rate on the film surface. Planar or cylindrical magnetron sputtering target can be configured, with DC, intermediate frequency and other target power supply can get metal film, compound film, dielectric film and various film system on glass and on acrylic substrate. It can also be equipped with cryogenic system, bombardment or ion source cleaning system and substrate heating system according to the needs of the processing. Widely used in electronics, home appliances and automotive mirror coating products.

 

The vacuum chamber of the vertical double-chamber rotary coating production line is divided into two independent chambers on the left and right side, each chamber has an independent pump group. The front end and the back end of the production line are respectively provided with a return frame and a return chamber, The workpieces on the rotary rack enter the rotary chamber through the right side chambers of each vacuum chamber, and return to the rotary rack to load and unload the workpieces from the rotary chamber through the left side chambers.The left and right side of the coating chamber are equipped with magnetron sputtering targets, can be coated on both sides, thus increase the deposition speed, It also greatly saved the floor area of the production line and reduces the chance of contamination when the workpiece is returned to the vacuum chamber.

If the rotary frame and rotary chamber at the front end and back end of the production line are replaced with translation frame and translational chamber, the left and right sides of the workpiece frame can be loaded with the workpiece (double-sides coating), the production efficiency can be doubled.

Products Conten

Main feature:

◆Vertical structure film better quality, product quality is more stable, wide application range

◆Stable equipment, reduce labor force, high production efficiency.

◆Adopts programmable controller (PLC), touch screen (HMI) man-machine control interface, easy to operate

◆Double – chamber rotary coating production line greatly saved the area of the production line

◆Double–chamber rotary coating production line has higher efficiency and wider application.

 

Production line model：

DXJL-1020-12B-6      DXJL-1224-12B-6

 

Workpiece size（mm)：

H1000×L2000          H1200×L2440  

Note：

Production line size and configuration can be customized according to customer requirements


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